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Modeling of EUV Photoresists with a Resist Point S...
作者
Patrick Naulleau / Jason P. Cain / Costas J. Spanos
出版2005
ISBN
OCLC:316301132
Characterization of Advanced EUV Resists Using the...
作者
Patrick Naulleau
出版2006
ISBN
OCLC:316301627
Resist-based Measurement of Contrast Transfer Func...
作者
Patrick Naulleau / Jason P. Cain / Costas J. Spanos
出版2005
ISBN
OCLC:316301125
Darwin Art Treasures Exhibition
出版1868
ISBN
OCLC:31468600
Lithographic Characterization of Low-order Aberrat...
作者
Kenneth A. Goldberg / Patrick Naulleau / Jason Cain / Kim Dean
出版2006
ISBN
OCLC:316301370
Critical Dimension Sensitivity to Post-exposure Ba...
作者
Patrick Naulleau / Jason P. Cain / Costas J. Spanos
出版2005
ISBN
OCLC:316301128
Extreme Ultraviolet (EUV) Lithography IV
出版2013
ISBN
OCLC:856341654
Advanced 0.3-NA EUV Lithography Capabilities at th...
作者
Kenneth A. Goldberg / Patrick Naulleau / Paul Denham / Erik Anderson / Keith Jackson / Kim Dean / Brian Hoef
出版2005
ISBN
OCLC:316301378
Two-wave Pattern Shift Aberration Monitor for Cent...
作者
Patrick Naulleau / Jason P. Cain / Bruno La Fontaine / Adam Pawloski / Costas Spanos / Obert Reeves Wood / Gregory McIntyre / AndrewR. Neureuther
出版2005
ISBN
OCLC:316325845
Extreme Ultraviolet (EUV) Lithography II
作者
Bruno M. La Fontaine / Patrick Naulleau
出版SPIE-International Society for Optical Engineering, 2011
ISBN
0819485284 / 9780819485281
主題
Extreme ultraviolet lithography
Extreme Ultraviolet (EUV) Lithography III.
出版2012
ISBN
0819489786 / 9780819489784
Lithographic Measurement of EUV Flare in the 0.3-N...
作者
Patrick Naulleau / Jason P. Cain / Costas J. Spanos
出版2005
ISBN
OCLC:316301119
Investigation of the Current Resolution Limits of ...
作者
Kenneth A. Goldberg / Patrick Naulleau / Paul Denham / Clemens Rammeloo / Jason P. Cain / Kim Dean / Brian Hoef / Bruno La Fontaine / Adam Pawloski / Carl Larson / Greg Wallraff
出版2005
ISBN
OCLC:316307854
חרוזים בני בית
出版1985
ISBN
OCLC:232879639
Design and Fabrication of Advanced EUV Diffractive...
作者
Patrick P. Naulleau / Eric M. Gullikson / J. Alexander Liddle / Erik H. Anderson / Farhad Salmassi
出版2003
ISBN
OCLC:316485593
Holographic Optical Elements for the Extreme-ultra...
作者
Patrick P. Naulleau / Eric M. Gullikson / Erik H. Anderson / Farhad Salmassi
出版2006
ISBN
OCLC:316326440
Preparations for EUV Interferometry of the 0.3 NA ...
作者
Kenneth A. Goldberg / Patrick P. Naulleau / Paul E. Denham / Eric Gullikson / J. Alexander Liddle / Erik H. Anderson / Bruce Harteneck / Keith H. Jackson / Senajith B. Rekawa
出版2003
ISBN
OCLC:316505906
Coherence and Speckle Techniques for Imaging Throu...
作者
Patrick Pascal Naulleau
出版1997
ISBN
UOM:39015041232482
Extreme Ultraviolet (EUV) Lithography III
出版2012
ISBN
OCLC:809932864
主題
Extreme ultraviolet lithography
Optical Signal Processing and Real World Applicati...
作者
Patrick Pascal Naulleau
出版1993
ISBN
OCLC:31684796
主題
Optical data processing
An unlikely meeting (Une rencontre improbable, eng...
作者
Daniel Catelain / Patrick Bowles / Alex Neish / Nazli Nour
出版1966
ISBN
OCLC:163937438