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Achieving High Rates and High Uniformity in Copper Chemical Mechanical Polishing

Lucy Marjorie Nolan

出版	Library and Archives Canada = Bibliothèque et Archives Canada, 2012
ISBN	04948956759780494895672
URL	http://books.google.com.hk/books?id=3dUrnQAACAAJ&hl=&source=gbs_api