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Microengineering, MEMS, and Interfacing
Danny Banks
其他書名
A Practical Guide
出版CRC Press, 2006-03-23
主題Technology & Engineering / Electronics / MicroelectronicsTechnology & Engineering / Civil / GeneralTechnology & Engineering / MechanicalTechnology & Engineering / Industrial Design / General
ISBN14200154199781420015416
URLhttp://books.google.com.hk/books?id=5InMBQAAQBAJ&hl=&source=gbs_api
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註釋MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering