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Extreme Ultraviolet Phase Contrast Imaging

Kenneth GoldbergEric GulliksonGregory DenbeauxAndy AquilaYanwei LiuObert Reeves WoodAnton BartyRashi Garg

出版	Environmental Measurements Laboratory (U.S.), 2005
URL	http://books.google.com.hk/books?id=5TrcjwEACAAJ&hl=&source=gbs_api

註釋

The conclusions of this report are: (1) zone plate microscopy provides high resolution imaging of EUV masks; (2) using phase plates in the back focal plane of the objective lens can provide contrast mechanisms for measurement of the phase shift from defects on the mask; (3) the first high resolution EUV Zernike phase contrast images have been acquired; and (4) future work will include phase contrast mode in reflection from an EUV mask to directly measure the reflectivity and phase shift from defects.