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CVD of Compound Semiconductors
Anthony C. Jones
Paul O'Brien
其他書名
Precursor Synthesis, Developmeny and Applications
出版
John Wiley & Sons
, 2008-11-20
主題
Science / Mechanics / Thermodynamics
Technology & Engineering / Electronics / General
Technology & Engineering / Electrical
ISBN
3527614621
9783527614622
URL
http://books.google.com.hk/books?id=5bLXwDPxQ08C&hl=&source=gbs_api
EBook
SAMPLE
註釋
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.
Topics included:
* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy
Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.