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Handbook of Surface and Nanometrology
David J. Whitehouse
出版
CRC Press
, 2002-12-01
主題
Science / Physics / General
Technology & Engineering / Materials Science / General
Technology & Engineering / Nanotechnology & MEMS
ISBN
1420034197
9781420034196
URL
http://books.google.com.hk/books?id=84MrBgAAQBAJ&hl=&source=gbs_api
EBook
SAMPLE
註釋
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit