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Materials Science in Microelectronics I
Eugene Machlin
其他書名
The Relationships Between Thin Film Processing and Structure
出版Elsevier, 2010-07-07
主題Technology & Engineering / Materials Science / GeneralTechnology & Engineering / Electronics / General
ISBN00804596099780080459608
URLhttp://books.google.com.hk/books?id=92-yeaGWZAYC&hl=&source=gbs_api
EBookSAMPLE
註釋Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.