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Effects of Electrode Distance and Target Angles on Elemental Concentrations and Film Properties of Al-doped ZnO Films Prepared by Magnetron Co-sputtering

Angelika GorgullaKay HagedornGiso HahnBarbara Terheiden

出版	2016
URL	http://books.google.com.hk/books?id=9yqGAQAACAAJ&hl=&source=gbs_api