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Radiation Effects in Advanced Semiconductor Materials and Devices
C. Claeys
E. Simoen
出版
Springer Science & Business Media
, 2013-11-11
主題
Science / Physics / Crystallography
Business & Economics / Industries / Energy
Science / Physics / Electricity
Technology & Engineering / Materials Science / General
Technology & Engineering / Materials Science / Electronic Materials
Technology & Engineering / Materials Science / Thin Films, Surfaces & Interfaces
Science / Physics / Condensed Matter
Science / Physics / Atomic & Molecular
Technology & Engineering / Power Resources / General
Science / Physics / Optics & Light
Technology & Engineering / Electronics / General
ISBN
3662049740
9783662049747
URL
http://books.google.com.hk/books?id=AonqCAAAQBAJ&hl=&source=gbs_api
EBook
SAMPLE
註釋
In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.