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Polymeric Materials for Microelectronic Applications
Hiroshi Ito
其他書名
Science and Technology
出版American Chemical Society, 1994
主題Language Arts & Disciplines / Linguistics / GeneralScience / Chemistry / OrganicScience / Chemistry / Industrial & TechnicalTechnology & Engineering / Electronics / MicroelectronicsTechnology & Engineering / MechanicalTechnology & Engineering / Textiles & Polymers
ISBN08412305529780841230552
URLhttp://books.google.com.hk/books?id=CWHxAAAAMAAJ&hl=&source=gbs_api
註釋Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.