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Epitaxy of Semiconductors
Udo W. Pohl
其他書名
Introduction to Physical Principles
出版
Springer Science & Business Media
, 2013-01-11
主題
Technology & Engineering / Electronics / Semiconductors
Technology & Engineering / Materials Science / Electronic Materials
Science / Chemistry / Physical & Theoretical
Science / Applied Sciences
Science / Physics / Crystallography
Technology & Engineering / Superconductors & Superconductivity
Technology & Engineering / Electrical
Technology & Engineering / Electronics / General
Science / Physics / General
Science / Physics / Condensed Matter
ISBN
3642329705
9783642329708
URL
http://books.google.com.hk/books?id=DShEAAAAQBAJ&hl=&source=gbs_api
EBook
SAMPLE
註釋
Introduction to Epitaxy provides the essential information for a comprehensive upper-level graduate course treating the crystalline growth of semiconductor heterostructures. Heteroepitaxy represents the basis of advanced electronic and optoelectronic devices today and is considered one of the top fields in materials research. The book covers the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and the description of the major growth techniques metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy. Cubic semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures and processes during nucleation and growth are treated in detail. The Introduction to Epitaxy requires only little knowledge on solid-state physics. Students of natural sciences, materials science and electrical engineering as well as their lecturers benefit from elementary introductions to theory and practice of epitaxial growth, supported by pertinent references and over 200 detailed illustrations.