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Semiconductor Materials and Process Technology Handbook

Gary F. McGuire

出版	Elsevier Science, 1988-12-31
主題	Science / Physics / Quantum TheoryTechnology & Engineering / Electronics / SemiconductorsTechnology & Engineering / ManufacturingTechnology & Engineering / Technical & Manufacturing Industries & TradesTechnology & Engineering / Materials Science / GeneralTechnology & Engineering / Electronics / GeneralTechnology & Engineering / Electronics / MicroelectronicsScience / Physics / GeneralTechnology & Engineering / Superconductors & SuperconductivityScience / Chemistry / Industrial & TechnicalComputers / Computer ArchitectureTechnology & Engineering / Electronics / Circuits / GeneralScience / Physics / Condensed Matter
ISBN	08155115079780815511502
URL	http://books.google.com.hk/books?id=FlwJ0AEACAAJ&hl=&source=gbs_api

註釋

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.