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Semiconductor Strain Metrology
Terence K. S. Wong
其他書名
Principles and Applications
出版Bentham Science Publishers, 2012
主題Technology & Engineering / Electronics / Semiconductors
ISBN16080535989781608053599
URLhttp://books.google.com.hk/books?id=GFINtdlxtzQC&hl=&source=gbs_api
EBookSAMPLE
註釋This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this e-book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.