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Operation of the 'Frankfurt' Electron Beam Annealer for Annealing of Implanted Materials
D. A. Carder
Andreas Markwitz
出版
GNS Science
, 2009
ISBN
0478196830
9780478196832
URL
http://books.google.com.hk/books?id=HIAMQgAACAAJ&hl=&source=gbs_api