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MOS (Metal Oxide Semiconductor) Physics and Technology
E. H. NicollianJ. R. Brews
出版John Wiley & Sons, 2002-11-21
主題Technology & Engineering / Electronics / SemiconductorsTechnology & Engineering / Electronics / GeneralTechnology & Engineering / Electrical
ISBN047143079X9780471430797
URLhttp://books.google.com.hk/books?id=IgUVEAAAQBAJ&hl=&source=gbs_api
EBookSAMPLE
註釋Explains the theoretical and experimental foundations of the measurement of the electrical properties of the MOS system and the technology for controlling its properties. Emphasizes the silica and the silica-silicon interface. Provides a critical assessment of the literature, corrects incomplete or incorrect theoretical formulations, and gives critical comparisons of measurement methods. Contains information needed to grow an oxide, make an MOS capacitor array, and fabricate an integrated circuit with optimal performance and stability.