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Manufacturing Techniques for Microfabrication and Nanotechnology
Marc J. Madou
出版CRC Press, 2011-06-13
主題Technology & Engineering / Nanotechnology & MEMSTechnology & Engineering / ManufacturingTechnology & Engineering / Electronics / MicroelectronicsTechnology & Engineering / Materials Science / GeneralTechnology & Engineering / Environmental / GeneralTechnology & Engineering / ElectricalTechnology & Engineering / MechanicalTechnology & Engineering / MicrowavesTechnology & Engineering / Engineering (General)
ISBN14398953099781439895306
URLhttp://books.google.com.hk/books?id=JUPOBQAAQBAJ&hl=&source=gbs_api
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註釋Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d