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Improved Silicon Surface Passivation by ALD Al2O3/SiO2 Multilayers with In‐Situ Plasma Treatments

Armin RichterHemangi PatelChristian ReichelJan BenickStefan Glunz

出版	Universität, 2023
URL	http://books.google.com.hk/books?id=KBsg0AEACAAJ&hl=&source=gbs_api