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Ulsi Front-end Technology: Covering From The First Semiconductor Paper To Cmos Finfet Technology
Wai Shing Lau
出版World Scientific, 2017-08-23
主題Technology & Engineering / Electronics / SemiconductorsTechnology & Engineering / Electronics / Circuits / VLSI & ULSITechnology & Engineering / Electronics / Circuits / General
ISBN98132221749789813222175
URLhttp://books.google.com.hk/books?id=KRM0DwAAQBAJ&hl=&source=gbs_api
EBookSAMPLE
註釋The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.