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Semiconductor Industrial Hygiene Handbook
David G. BaldwinPaul C. ManzMichael E. Williams
其他書名
Monitoring, Ventiliation, Equipment and Ergonomics
出版William Andrew, 1995-12-31
主題Science / Physics / Quantum TheoryTechnology & Engineering / Electronics / Semiconductors
ISBN08155189789780815518976
URLhttp://books.google.com.hk/books?id=KhLuaV1sGGIC&hl=&source=gbs_api
EBookSAMPLE
註釋This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.