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Thin Film Precursors, Properties and Applications
Peter George Gordon
其他書名
Chemical Vapour Deposition and Atomic Layer Deposition of Group 4, 11 and 13 Elements and Their Oxides
出版Carleton University, 2013
URLhttp://books.google.com.hk/books?id=MPretwEACAAJ&hl=&source=gbs_api