登入選單
返回Google圖書搜尋
Optical Imaging in Projection Microlithography
Alfred Kwok-Kit Wong
出版SPIE Press, 2005
主題Technology & Engineering / Electronics / Circuits / GeneralTechnology & Engineering / Electronics / Circuits / IntegratedTechnology & Engineering / Imaging SystemsTechnology & Engineering / Industrial TechnologyTechnology & Engineering / Optics
ISBN08194582959780819458292
URLhttp://books.google.com.hk/books?id=N35kY_q_NAQC&hl=&source=gbs_api
EBookSAMPLE
註釋Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.