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Application of Micro-electro-mechanical Systems (MEMS) Technology in Design and Fabrication of Silicon Hydrogen Microfuel Cells and Silicon Integrated Sensor Arrays for Micro Gas Chromatography Systems

Kevin Yu-Chung Lin

出版	University of Illinois at Urbana-Champaign, 2009
URL	http://books.google.com.hk/books?id=TjGqYgEACAAJ&hl=&source=gbs_api