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Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2-based MIM Structures
Thomas SzyjkaLutz BaumgartenTerence MittmannYury MatveyevChristoph SchlueterThomas MikolajickUwe SchroederMartina Müller
其他書名
The Impact of Annealing Gas
出版KOPS Universität Konstanz, 2021
URLhttp://books.google.com.hk/books?id=TjefzgEACAAJ&hl=&source=gbs_api