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Senturia, Stephen D.·森特乌里亚森图里亚

出版	电子工业出版社, 2004
ISBN	71210042249787121004223
URL	http://books.google.com.hk/books?id=V3YnAAAACAAJ&hl=&source=gbs_api

註釋

Ben shu jie shao le she ji wei ji dian xi tong(MEMS)She ji de fang fa, Li lun he ji shu, Bao kuo MEMS zhi zuo gong yi he feng zhuang ji shu, MEMS qi jian de jian mo he mo ni, Xiang guan dian zi xian lu yu xi tong.