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Chemical Mechanical Polishing 9
G. BanerjeeK. SundaramV. DesaiY. Obeng
出版The Electrochemical Society, 2008-05
主題Science / General
ISBN15667762959781566776295
URLhttp://books.google.com.hk/books?id=VYnD7H8SXUwC&hl=&source=gbs_api
EBookSAMPLE
註釋The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Chemical Mechanical Polishing 9¿, held during the 213th meeting of The Electrochemical Society, in Phoenix, Arizona from May 18-23, 2008.