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Microelectronics Technology and Devices--SBMICRO 2007
João Antonio Martino
出版The Electrochemical Society, 2007
主題Technology & Engineering / Electronics / GeneralTechnology & Engineering / Electronics / Microelectronics
ISBN15667756559781566775656
URLhttp://books.google.com.hk/books?id=W9Po5XrxrAYC&hl=&source=gbs_api
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註釋Proceedings from an international symposium held as part of the "Chip in Rio" conference held in Rio de Janeiro, Brazil, in September 2007. Sixty-six contributions are organized into sections on multiple gates, thin films and processes, characterization and modeling, micro electromechanical systems (MEMS), and sensors and actuators. A sampling of topics: sidewall angle influence on the FinFET analog parameters, distortion analysis of triple-gate transistor in saturation, semiconductor surface cleaning and conditioning challenges beyond planar silicon technology, the influence of substrates on the carbon nanotube growth process, electromigration modeling for interconnect structures in microelectronics, coupled quantum dot cell dynamics, silicon microtips with self-asligned integrated electrodes, simple MEMS-based incandescent microlamps, zinc-oxide surface acoustic wave device fabrication, and influence of the interferers in the nitrite detection by using planar electrochemical sensors.