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Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices
Thomas Wächtler
出版Thomas Waechtler, 2010
ISBN39410031789783941003170
URLhttp://books.google.com.hk/books?id=WHhnqkp_SgYC&hl=&source=gbs_api
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