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Semiconductor Materials and Process Technology Handbook
G. E. McGuire
其他書名
For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
出版Noyes Publications, 1988
ISBN08155115079780815511502
URLhttp://books.google.com.hk/books?id=WyJTAAAAMAAJ&hl=&source=gbs_api
註釋A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.