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Process Engineering Analysis in Semiconductor Device Fabrication

Stanley MiddlemanArthur K. Hochberg

出版	McGraw-Hill, 1993
主題	Technology & Engineering / ElectricalTechnology & Engineering / Electronics / Semiconductors
ISBN	00704185359780070418530
URL	http://books.google.com.hk/books?id=XgZTAAAAMAAJ&hl=&source=gbs_api

註釋

Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.