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Chemistry of the Semiconductor Industry

S.J. MossA. Ledwith

出版	Springer Science & Business Media, 1989-02-28
主題	Technology & Engineering / Materials ScienceTechnology & Engineering / Textiles & PolymersTechnology & Engineering / Electronics / GeneralTechnology & Engineering / ElectricalScience / Chemistry / Organic
ISBN	02169200519780216920057
URL	http://books.google.com.hk/books?id=ZkGMSL_V3uwC&hl=&source=gbs_api
EBook	SAMPLE

註釋

This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.