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X-ray Diffraction Characterization of Suspended Structures ForMEMS Applications
N. Tamura
J.-A. Petit
P. Goudeau
B. Lavelle
S. Rigo
J.-M. Desmarres
T. Masri
A. Bosseboeuf
T. Sarnet
出版
Lawrence Berkeley National Laboratory
, 2005
URL
http://books.google.com.hk/books?id=_9ienQAACAAJ&hl=&source=gbs_api
註釋
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.
