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Influence of Hydrogen Effusion from Hydrogenated Silicon Nitride Layers on the Regeneration of Boron-oxygen Related Defects in Crystalline Silicon

Svenja Wilking

出版	Bibliothek der Universität Konstanz, 2013
URL	http://books.google.com.hk/books?id=cPPgtwEACAAJ&hl=&source=gbs_api