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Rapid Thermal Processing of Semiconductors
Victor E. BorisenkoPeter J. Hesketh
出版Springer Science & Business Media, 2013-11-22
主題Technology & Engineering / Materials Science / Electronic MaterialsScience / Physics / Condensed MatterScience / Chemistry / Physical & TheoreticalScience / Spectroscopy & Spectrum AnalysisTechnology & Engineering / Electronics / GeneralTechnology & Engineering / ManufacturingScience / Chemistry / Analytic
ISBN14899180439781489918048
URLhttp://books.google.com.hk/books?id=eXMECAAAQBAJ&hl=&source=gbs_api
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註釋Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.