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Diffusion in Semiconductors
出版Springer Berlin Heidelberg, 1998-03-18
主題Technology & Engineering / Electronics / SemiconductorsScience / Physics / Condensed MatterTechnology & Engineering / Superconductors & SuperconductivityTechnology & Engineering / ElectricalScience / Physics / General
ISBN35406096449783540609643
URLhttp://books.google.com.hk/books?id=jBqGAQAACAAJ&hl=&source=gbs_api
註釋Subvolume A of two subvolumes on Diffusion in Semiconductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.