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X-ray optics made by X-ray lithography: Process optimization and quality control
Koch, Frieder Johannes
出版KIT Scientific Publishing, 2017-10-16
ISBN37315067939783731506799
URLhttp://books.google.com.hk/books?id=lWg8DwAAQBAJ&hl=&source=gbs_api
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註釋Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.