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Thin Film Processes II
Werner Kern
出版Elsevier, 2012-12-02
主題Technology & Engineering / Materials Science / General
ISBN00805242149780080524214
URLhttp://books.google.com.hk/books?id=owMVeiPmQaAC&hl=&source=gbs_api
EBookSAMPLE
註釋This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. - Provides an all-new sequel to the 1978 classic, Thin Film Processes - Introduces new topics, and several key topics presented in the original volume are updated - Emphasizes practical applications of major thin film deposition and etching processes - Helps readers find the appropriate technology for a particular application