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出版John Wiley & Sons, 2017-01-17
主題Technology & Engineering / Electronics / MicroelectronicsTechnology & Engineering / OpticsScience / Electron Microscopes & MicroscopyTechnology & Engineering / Electronics / GeneralTechnology & Engineering / Electrical
ISBN11187179619781118717967
URLhttp://books.google.com.hk/books?id=p01_BwAAQBAJ&hl=&source=gbs_api
EBookSAMPLE
註釋A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices