註釋 With this project, the know-how about quantitative depth profile analysis (QDP) using radio frequency (RF) GD-OES has been greatly advanced. Applied to a range of real-world industrial materials, it has been proven that QDP using RF GD-OES can indeed provide accurate quantitative information, indeed for very demanding applications where no alternative technique for rapid analysis exists. In the course of this work, the understanding of the function of the existing RF sources and how to use them in practical analytical work has also been greatly advanced. In a brief description, the following has been accomplished. - It has been shown that multi-matrix calibration of RF GD-OES systems can be accomplished in the same way as for DC systems, provided that care is taken in adjusting the discharge conditions properly for each material type. - It has been shown that QDP of conductive coatings can be accomplished with comparable accuracy using RF and DC systems. - Suitable discharge conditions for a range of non-conductive coatings have been established and workable instructions on how to obtain such conditions using different types of RF systems. - QDP of several types of non-conductive coatings has been carried out using three different types of RF sources, with generally very consistent results. - The matrix correction algorithm introduced in the preceding method development project has proven its worth and necessity. - The QDP results of non-conductive coatings have been verified against other analytical methods wherever possible, in most cases with very satisfactory results. Particularly for RF sources, the influence on the emission yields from plasma parameters (power, voltage) and hydrogen is extremely important for accurate quantified results. Within the project, this has been extensively studied experimentally, showing that RF and DC sources have identical characteristics within experimental error. This is one of the most important results of the project, and a large number of correction constants have been tabulated. Among the problems encountered, the most negative is perhaps the fact that the principle of matrix-independent calibration has been shown not to hold completely true for all applications. It has been demonstrated that for polymers, the degree of atomisation of carbon and probably hydrogen is less than from metallic and ceramic materials. For quantitative analysis, this means that it is necessary to use matrix-matched calibration materials for these applications. 