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Rapid Thermal and Other Short-time Processing Technologies
Fred Roozeboom
其他書名
Proceedings of the International Symposium
出版The Electrochemical Society, 2000
主題Technology & Engineering / GeneralTechnology & Engineering / Electronics / Circuits / IntegratedTechnology & Engineering / Manufacturing
ISBN15667727459781566772747
URLhttp://books.google.com.hk/books?id=rPFvAfMKZ7IC&hl=&source=gbs_api
EBookSAMPLE
註釋The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.