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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
Marc J. Madou
出版CRC Press, 2011-06-13
主題Science / Physics / Condensed MatterTechnology & Engineering / Electronics / MicroelectronicsTechnology & Engineering / Materials Science / GeneralTechnology & Engineering / Nanotechnology & MEMSTechnology & Engineering / Environmental / GeneralTechnology & Engineering / MechanicalScience / Life Sciences / General
ISBN14398953419781439895344
URLhttp://books.google.com.hk/books?id=sRvSBQAAQBAJ&hl=&source=gbs_api
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註釋Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integra