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Glow Discharge Processes
Brian Chapman
其他書名
Sputtering and Plasma Etching
出版Wiley, 1980-09-25
主題Science / Physics / ElectromagnetismTechnology & Engineering / Electronics / GeneralTechnology & Engineering / Electrical
ISBN047107828X9780471078289
URLhttp://books.google.com.hk/books?id=tx5RAAAAMAAJ&hl=&source=gbs_api
註釋Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.