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Materials Science in Microelectronics II
Eugene Machlin
其他書名
The Effects of Structure on Properties in Thin Films
出版Elsevier, 2010-07-07
主題Technology & Engineering / Materials Science / GeneralTechnology & Engineering / Electronics / General
ISBN00804604029780080460406
URLhttp://books.google.com.hk/books?id=uZNZEgzJltoC&hl=&source=gbs_api
EBookSAMPLE
註釋The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: •Electrical properties•Magnetic properties•Optical properties•Mechanical properties•Mass transport properties•Interface and junction properties•Defects and properties - Captures the importance of thin films to microelectronic development - Examines the cause / effect relationship of structure on thin film properties