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Influence of Deposition Parameters on Elemental Concentrations, Electrical, and Optical Properties of Magnetron Co-sputtered Al-doped ZnO Films

Angelika GorgullaDominik-Pascal ErtelGiso HahnBarbara Terheiden

出版	2016
URL	http://books.google.com.hk/books?id=usayAQAACAAJ&hl=&source=gbs_api