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Extreme Ultraviolet Lithography
Harry J. Levinson
出版
SPIE Press
, 2020
主題
Technology & Engineering / Engineering (General)
Technology & Engineering / Optics
ISBN
151063939X
9781510639393
URL
http://books.google.com.hk/books?id=vK0LzgEACAAJ&hl=&source=gbs_api
註釋
This book covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced the areas of technical focus, are discussed. Potential improvements to current EUV technology and extensions to future nodes are also covered. Each topic is approached from the perspective of a practicing lithographer in a wafer fab, in either manufacturing or development, and there are many references at the end of each chapter.