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Simulation of Semiconductor Processes and Devices 2004
Gerhard Wachutka
Gabriele Schrag
其他書名
Sispad 2004
出版
Springer Science & Business Media
, 2004-08-23
主題
Computers / Artificial Intelligence / General
Computers / Computer Science
Computers / Computer Simulation
Computers / Design, Graphics & Media / Graphics Tools
Science / Nanoscience
Technology & Engineering / Electrical
Technology & Engineering / Electronics / General
Technology & Engineering / Electronics / Microelectronics
Technology & Engineering / Electronics / Semiconductors
Technology & Engineering / Engineering (General)
Technology & Engineering / Materials Science / General
Technology & Engineering / Materials Science / Electronic Materials
Technology & Engineering / Nanotechnology & MEMS
Technology & Engineering / Optics
ISBN
3211224688
9783211224687
URL
http://books.google.com.hk/books?id=wNJ-Lfs8m9MC&hl=&source=gbs_api
EBook
SAMPLE
註釋
This volume contains the proceedings of the 10th edition of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2004), held in Munich, Germany, on September 2-4, 2004. The conference program included 7 invited plenary lectures and 82 contributed papers for oral or poster presentation, which were carefully selected out of a total of 151 abstracts submitted from 14 countries around the world. Like the previous meetings, SISPAD 2004 provided a world-wide forum for the presentation and discussion of recent advances and developments in the theoretical description, physical modeling and numerical simulation and analysis of semiconductor fabrication processes, device operation and system performance. The variety of topics covered by the conference contributions reflects the physical effects and technological problems encountered in consequence of the progressively shrinking device dimensions and the ever-growing complexity in device technology.