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Lithography Process Control
Harry J. Levinson
出版SPIE Press, 1999
主題Photography / Techniques / EquipmentTechnology & Engineering / GeneralTechnology & Engineering / Industrial TechnologyTechnology & Engineering / ManufacturingTechnology & Engineering / Optics
ISBN08194305289780819430526
URLhttp://books.google.com.hk/books?id=wpRqq6D69AwC&hl=&source=gbs_api
EBookSAMPLE
註釋This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.