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Dielectrics for Nanosystems 4: Materials Science, Processing, Reliability, and Manufacturing
註釋This issue of ECS Transactions outlines the dielectric issues in all areas of nanosystems including the traditional areas of semiconductor processing and packaging of nanoelectronics. Various other areas, where multifunctional device integration through innovation in design, materials, and processing at the device and system level will lead to new applications of nanosystems, like electronic, optical, magnetic, mechanical, biological, chemical, energy sources, and various types of sensing devices will be included.